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2007.Apr.20

HOYA CORPORATION
R&D Center
QD-EL Research Group

Liquid-dispersed quantum-dots ion-beam deposition apparatus

LIQUID RO-01EA

Liquid-dispersed quantum-dots ion-beam deposition (LIQUID) system helps quantum dots (QD) device technologies.

Our original equipment has capability to produce QD luminescent thin films in a vacuum chamber from a solution in ambient atmosphere.

Highly luminescent semiconductor QDs in colloidal solutions are ionized by an electrosprayer being separated from the solvents. QDs are made into ion beams and pass through jet and skimmer nozzles, finally deposited to a substrate.

	Electrospray ionizar & supersonic jet emitter The solvents and capping surfactant are removed from a solution of nanocrystals. Quantum dots ion beam is accelerated on passing through two nozzles into vacuum system.
	Energy analyzer The energy analyzer can be adjusted to select ions with an energy. The selected ions with a specified energy can pass to the deposition chamber. (The energy of ion is corresponding to a mass-charge ratio.)

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Reference

Ion Beam Deposition Technique for Fabricating Luminescent Thin Films from a Solution of Nanocrystalline Semiconductor Dots
Satoshi Kobayashi, Yuki Tani, and Hiroshi Kawazoe
Jpn. J. Appl. Phys. 46 (2007) L392

Ion Beam Deposition of Quantum Dots from Colloidal Solution
Yuki Tani, Satoshi Kobayashi, and Hiroshi Kawazoe
Jpn. J. Appl. Phys. 47 (2008) pp. 2977-2981

Patent applied for WO 2006/043656 A1
　
Contact information:
HOYA　Corpration　R&D Center
3-3-1, musashino, akisima-shi, Tokyo 196-8510 Japan
FAX:+81-42-546-2742
liquid@sngw.rdc.hoya.co.jp
Planning section